(Sb/sub 2/Te/sub 3/)/sub x/(TiTe/sub 2/) superlattices with varying values of x and fixed y were prepared using modulated elemental reactants. A procedure to calibrate the ratio of the elements and the absolute amount deposited is discussed. The structure of a reactant designed to form a (Sb/sub 2/Te/sub 3/)/sub 3/(TiTe/sub 2/)/sub 3/ superlattice is followed as a function of annealing temperature. The annealing conditions obtained from this study enabled us to prepare a series of (Sb/sub 2/Te/sub 3/)/sub x/(TiTe/sub 2/)/sub y/ superlattices. The samples were characterized using X-ray reflectivity, X-ray diffraction, and electron probe microanalysis (EPMA).
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Schmid et al. (2005) studied this question.
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