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Abstract Stability and scalability have become the two main challenges for perovskite solar cells (PSCs) with the research focus in the field advancing toward commercialization. One of the prerequisites to solve these challenges is to develop a cost‐effective, uniform, and high quality electron transport layer that is compatible with stable PSCs. Sputtering deposition is widely employed for large area deposition of high quality thin films in the industry. Here the composition, structure, and electronic properties of room temperature sputtered SnO 2 are systematically studied. Ar and O 2 are used as the sputtering and reactive gas, respectively, and it is found that a highly oxidizing environment is essential for the formation of high quality SnO 2 films. With the optimized structure, SnO 2 films with high quality have been prepared. It is demonstrated that PSCs based on the sputtered SnO 2 electron transport layer show an efficiency up to 20.2% (stabilized power output of 19.8%) and a T 80 operational lifetime of 625 h. Furthermore, the uniform and thin sputtered SnO 2 film with high conductivity is promising for large area solar modules, which show efficiencies over 12% with an aperture area of 22.8 cm 2 fabricated on 5 × 5 cm 2 substrates (geometry fill factor = 91%), and a T 80 operational lifetime of 515 h.
Qiu et al. (Thu,) studied this question.