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Study employs low-voltage scanning electron microscopy to monitor beam damage in nonconducting materials, indicating improved imaging quality.
Scanning electron microscopy (SEM) is a popular surface characterization technique. However, SEM observation and measurement of nonconducting soft materials still suffer from the charge effect and beam damage caused by high landing energy. In this work, a low-voltage SEM (LVSEM) was employed to directly observe and record the in situ beam damage of nonconducting polymer films. A series of unprecedented high-quality surface structure images of the nonconducting materials was obtained by controlling the landing energy of the incident electron beam.
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Wang et al. (2026) studied this question.
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