This theoretical validation identifies process parameters for hydrofluoric acid production, indicating key engineering challenges and solutions.
This report provides literature-based theoretical validation of process parameter windows for a sulfuric-acid-free route to UP-SSS-grade electronic-grade hydrofluoric acid. Each unit operation is verified against published data. Key engineering challenges (NF₃ safety, adsorbent lifetime, silica filtration, pyrolysis corrosion) are identified with theoretical mitigation strategies and pilot validation metrics. This is a desktop validation containing no experimental measurements. Conclusions are falsifiable by future experimental work.
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Li Yu (2026) studied this question.
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