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Demonstrates improved high-order resonance in flexible FBARs, indicating potential for advanced filters and sensors.
High-frequency flexible FBARs are limited by substrate leakage and the difficulty of maintaining stable high-order resonances when scaling conventional inorganic piezoelectric films. We propose an air-cavity-free flexible FBAR on a polyimide that integrates a β-PVDF/Sc 0.35 Al 0.65 N composite piezoelectric stack with a SiO 2 support layer. The acoustic-impedance mismatch at the β-PVDF/ScAlN interface and the SiO 2 /PI reflection collectively establish a multi-interface, Fabry–Pérot-like acoustic confinement, strengthening high-order resonance and reducing loss to the flexible substrate. Frequency-domain FEM predicts a stable high-order mode at 26.61 GHz with Q = 2523 ( f × Q = 6.71 × 10 13 ) and an estimated TCF of approximately −4.29 ppm °C −1 over −30 to 75 °C, suggesting the potential of this architecture for high-frequency flexible filters and wearable sensing platforms.
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Liu et al. (2026) studied this question.
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