Principle and Research Progress on Thermal-resistance-based Heat Flux Sensor with Micro-nano Structures

In aerothermodynamic and thermal protection testing, thermal-resistance-based heat flux sensors are the most widely used devices for measuring heat flux and thermal fields across various hypersonic ground simulation facilities. This paper outlines the basic measurement principles and classification of thermal-resistance-based heat flux sensors with micro-nano structures, and discusses the current state of technology and development of conventional heat flux sensors in terms of structural principles, material selection, the advantages and disadvantages of the devices, and their applications. Furthermore, a novel atomic layer thermopile (ALTP) thin-film heat flux sensor based on the transverse thermoelectric effect is introduced. As a nanoscale passive device, it offers a number of advantages, including the capacity to measure heat flux over a wide range, a broad spectral response range, fast response times, and a simple structure that is easily arrayed, making it particularly suitable for transient heat flux measurement and broad-spectrum photothermal dynamics detection. In the end, we present a prospective perspective on future research directions for heat flux sensors. This review sorts out key scientific and technical issues in order to provide a theoretical basis for the design and application of high performance heat flux sensors.