Frequency stability in MEMS oscillators: from resonator sensing to system-level compensation

Purpose The purpose of this study is to systematically examine advancements in microelectromechanical system (MEMS) oscillators, with a focus on their role as not only timing references but also high-sensitivity sensing platforms. This study highlights how frequency stability underpins their performance in applications such as environmental monitoring, biomedical sensing and industrial automation. Design/methodology/approach Adopting a sensor-oriented perspective, this review analyzes frequency stabilization techniques across resonator design, interface electronics and system integration. This paper covers sensor-relevant aspects including materials (e.g. AlN and ScAlN), transduction mechanisms (piezoelectric and capacitive), low-noise readout circuits, temperature compensation methods and nonlinear dynamic behavior. Emphasis is placed on implementations suitable for physical, chemical, biological and temperature sensors. Findings MEMS oscillators have evolved into dual-functional platforms for both timing and sensing. Innovations in resonator design – such as high-Q bulk acoustic modes and phononic structures – coupled with active compensation circuits (e.g. TIA-based interfaces and TDS-PLLs) enable frequency stabilities below ± 1 ppm and ultra-fine resolution in temperature, pressure and mass sensing. Nonlinear phenomena, including parametric resonance and synchronization, further enhance stability and enable novel sensing modalities. Originality/value This paper uniquely bridges MEMS oscillator stability with broader sensor applications, offering a unified review of resonator physics, circuit interfacing and system integration from a sensing perspective. This study identifies emerging trends such as multimode resonant sensing, oscillator-based sensor networks and nonlinear dynamic sensing, providing a forward-looking resource for researchers developing next-generation intelligent sensor systems.