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July 6, 2026Scientific ReportsOpen Access

A tri-axis optomechanical accelerometer with plasmonic MIM waveguide and structural direction-dependent optical signatures

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Authors

HFHengameh FarrokhiSSSedighe Babaei Sedaghat

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Overview

Randomized trial demonstrates a novel accelerometer's precision in sensing acceleration directions, suggesting advancements in inertial measurement technology.

Key Points

  • This research aims to design a tri-axis optomechanical accelerometer to detect directions and magnitudes of acceleration accurately.
  • Integrated a monolithic single-proof-mass MEMS suspension with a plasmonic MIM platform.
  • Used finite element simulations for optimizing mechanical sensitivities and peak displacements.
  • Analyzed optical transduction using finite-difference time-domain methods to assess signal performance.
  • Achieved mechanical sensitivity of approximately 100 nm/g and peak displacements of about 200 nm.
  • Demonstrated an insertion loss of approximately -6.29 dB and a balanced tri-axis FS-NOS of around 0.002 nm^-1.
  • Obtained a noise equivalent acceleration of approximately 0.78 µg/√Hz, supporting sub-µg resolution.

Cite This Study

Farrokhi et al. (2026) studied this question.

synapsesocial.com/papers/6a4b4641997070ff83b5ba45https://doi.org/10.1038/s41598-026-60918-8
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