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July 11, 2026Beilstein Journal of Nanotechnology0 citationsOpen Access

Exploratory Study of 3D AFM Tip Architectures Using He + FIBID

He + FIBID-fabricated 3D AFM tip architectures: an exploratory study of hollow pillars, helices, and spirals

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Authors

AAAlba Arroyo-FructuosoAGA. GaletGHGregor Hlawacek

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Overview

Exploratory study demonstrates the operational feasibility of complex AFM tips in controlled conditions, suggesting pathways for improved tip designs.

Key Points

  • This study aims to explore the mechanical integrity and geometric performance of 3D AFM tips fabricated using He + FIBID.
  • Fabricated tungsten–carbon (W–C) AFM tips with hollow pillars, helices, and spirals using helium ion beam-induced deposition (He + FIBID).
  • Tested tip geometries on a reference sample with a nominal step height of 20 nm across two AFM instruments.
  • Examined tips by electron microscopy both pre and post-AFM testing to assess structural integrity.
  • 3D-printed tips accurately reproduced the 20 nm nominal step height similar to commercial probes.
  • Significant geometric deformation and mechanical fracture were observed, particularly at the tip–cantilever interface.
  • Only a few structures remained functional after repeated measurement cycles, indicating challenges in robustness.
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Cite This Study

Arroyo-Fructuoso et al. (2026) studied this question.

synapsesocial.com/papers/6a51e084c18d7f28ca500d80https://doi.org/10.3762/bjnano.17.62
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