Electromagnetic Shielding of Optoelectronic Devices by Conductive ITO Coatings

In the present paper, we studied the interaction of microwave radiation with conductive indium tin oxide (ITO) coatings deposited on a borosilicate glass. The experiments were carried out with the ITO films, the thickness of which varied in the range from 85 to 607 nm. The transmittance and reflectivity of the ITO film/K108 glass structures were measured in the frequency region from 3 to 23 GHz. Theoretical modeling of the spectra was performed by means of the transfer matrix method. It was shown that for a given thickness of the glass substrate, the transmission and reflection spectra of the ITO film/K108 glass structures were fully determined by only one parameter of the ITO film, namely, its DC sheet resistivity. The considered model predicts an increase in maximum microwave shielding effectiveness up to 45.6 dB with a decrease in DC sheet resistivity to 1 Ohm/sq. ITO coatings with DC sheet resistivities down to 2.3 Ohm/sq have been experimentally investigated. The model microwave transmittance and reflectivity spectra were in good agreement with the experimental ones. In particular, the coefficient of determination for the transmittance spectra was rather high: R2 > 0.93. It was experimentally demonstrated that applying antireflective coatings on both sides of the ITO film/K108 glass microwave shielding filter significantly improved its transparency in the operating optical range. A filter has been created that provides microwave shielding effectiveness of 38.7 dB with an average transmission coefficient of 0.81 in the visible range.