Uniformity improvement of deep silicon cavities fabricated by plasma etching with 12-inch wafer level

The formation of various deep silicon structures using plasma etching has wide applications in sensors, micro-electro-mechanical systems and 3D wafer level integration. However, the fabrication of silicon cavities with high accuracy at depth within a large wafer size is still a challenge due to the large amount of etching required. Herein, silicon cavity etching uniformity approaching 3% in a depth of ~100 µ m on a 12-inch wafer is achieved through tuning the focus ring height, baffle shape, double zone helium cooling system and chamber pressure. The simulation of the electromagnetic field and gas flow field separately provides the guidance for the improvement, and the way in which the wafer temperature influences the etch uniformity is demonstrated. These results have significance for both the understanding of the plasma etching mechanism and the practical application of the silicon etching process for advanced device fabrication.