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Demonstrates improved precision in microstructured fabrication, suggesting a shift to model-guided methods.
≈ 29.3 μm). Guided by this model, we fabricated gradient MN arrays with a tip precision of 12.8 μm, approaching the optical diffraction limit (10 μm) and representing a 68% accuracy improvement over conventional methods. This work provides a quantitatively driven methodology for defect-free manufacturing of complex microstructures, shifting fabrication from empirical iteration to model-guided precision.
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LIU et al. (2026) studied this question.
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