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December 20, 2015The Journal of Physical Chemistry LettersOpen Access

Enhanced Etching, Surface Damage Recovery, and Submicron Patterning of Hybrid Perovskites using a Chemically Gas-Assisted Focused-Ion Beam for Subwavelength Grating Photonic Applications

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Authors

MAMohd Sharizal AliasYYYang YangTNTien Khee Ng

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Alias et al. (2015) studied this question.

synapsesocial.com/papers/6a615ebf77f983659ed091b9https://doi.org/10.1021/acs.jpclett.5b02558
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