Thermal Evolution of the Structure and Activity of Magnetron-Sputtered TM–C–N (TM=Fe, Co) Oxygen Reduction Catalysts

Thin-film libraries of (; ; ) have been prepared by combinatorial sputter deposition. The libraries were subsequently annealed at to induce structural and compositional changes. Using grazing-incidence X-ray diffraction and scanning electron microscopy, structural changes were followed as a function of annealing temperature. At temperatures above , the previously homogeneous and amorphous thin films became a heterogeneous mixture of (partially) graphitized nitrogen-containing carbon and either or . The onset of this transformation is accompanied by a rapid decrease in N content and occurs as a function of both transition metal content and temperature. Catalytic activity for oxygen reduction is at its maximum partway through this transformation.