We have fabricated and tested two-dimensional arrays of YBa2Cu3O7−δ superconducting quantum interference devices. The arrays contain over 36 000 nano Josephson junctions fabricated from ion irradiation of YBa2Cu3O7−δ through narrow slits in a resist-mask that was patterned with electron beam lithography and reactive ion etching. Measurements of current-biased arrays in magnetic field exhibit large voltage modulations as high as 30 mV.
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Cybart et al. (2014) studied this question.
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