Fabrication of two-dimensional coupled photonic crystal resonator arrays by holographic lithography

We demonstrate the holographic design and fabrication of two-dimensional coupled photonic crystal resonator arrays, which are composed of hexagonal cavities tiled together in a triangular lattice. Band structure analysis reveals that the inverse structure of the fabricated template supports monopole defect mode in a photonic band gap of TM polarization. Our results show the practical importance of holographic lithography in the fabrication of photonic component arrays.