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This work reports on an oscillating pressure sensor that converts pressure into frequency using the squeeze-film effect. A new aspect is the laser Doppler vibrometer (LDV) in the optoelectronic feedback loop that is used to bring the sensor element into sustained mechanical oscillation. A phase shifter and automatic gain control circuit stabilize the oscillation. The frequency stability of the pressure sensor is investigated by measuring its Allan deviation and is compared to the performance of a quartz oscillating pressure sensor. Finally, the pressure resolution of this oscillating sensor is compared to conventional pressure sensors.
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Kumar et al. (2015) studied this question.
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