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The ability to achieve accurate and reliable lifetime prognostics is critical to predictive maintenance of nano/micro motion systems. However, techniques to accomplish this task have not been well studied. This paper presents a stiffness-based degradation model for lifetime monitoring of a considered nanopositioning stage. Based on the dynamic model of the stage, an analysis of the relationship between system stiffness, running time and failure lifetime is investigated. A failure lifetime prognostic model for the stage is formulated by means of a dynamic stiffness analysis. This methodology is evaluated with numerical simulation and verified based on our experimental setup. The results reveal that this model can be used to effectively predict the failure lifetime and the remaining life of the investigated stage, which suggests its promising potentials in real applications.
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Wen et al. (2020) studied this question.
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