A combined machining method of diamond turning and numerically controlled elastic emission machining has been developed for finishing metal mirror surfaces made from Cu and Al alloys. A mirror surface can be polished without any stress by this method. Shape and roughness of the mirror surface examined in different machining methods are compared and discussed. A precisely shaped mirror with a roughness less than 2-nm Rmax was obtained. A copper mirror was installed in a VUV beamline of the Photon Factory. It is confirmed that the metal mirror finished by the present method has good optical characteristics for synchrotron radiation beamlines.
No takes yet. Share an insight, caveat, or question.
Higashi et al. (1989) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: