We demonstrate an optical tunable filter using Al/sub 2/O/sub 3/-GaAs layers as the top distributed Bragg reflector mirror. The mechanical properties and spectral response versus voltage are characterized. The tuning characteristics can be changed by removing the tensile-stressed Si/sub 3/N/sub 4/ on the mirror and legs. An integrated optical-mechanical model is used to analyze the result. Axial nitride and initial residual stress are incorporated into the model to obtain accurate fit. A 64-nm tuning range with 12-V tuning voltage is measured, a significant improvement over previous designs.
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Lin et al. (2004) studied this question.
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