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An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The in- terferometric system has a theoretical measurement dynamic range greater than 10 8 . Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.
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Tristan J. Tayag (2003) studied this question.
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