High performance and novel effects of micromechanical tunable vertical-cavity lasers

Widely continuously tunable sources are key elements for many applications. This paper discusses the first integrated laser able to continuously tune its wavelength more than 1%: the micromechanical tunable vertical-cavity surface-emitting laser (VCSEL). These devices have demonstrated up 19.1 nm of continuous tuning, threshold currents as low as 460 /spl mu/A, and powers as high as 0.9 mW. In addition to these results, this paper discusses the tuning speed, lifetime, and applicability as a new broad-band source of these devices. Despite mechanical tuning, speeds of /spl mu/s are possible and long lifetime is expected. A detailed consideration of the design and fabrication of these devices is performed. Finally, an interesting mode switching effect is presented.