Lift-off of a prefabricated thin-film lithium niobate device using ion slicing has been demonstrated. The device is a low-voltage electro-optically tunable TE/TM mode converter, which is fabricated on a sliced 10 µm-thick film. A new electrode configuration allows this thin-film device low-voltage tuning of the mode conversion wavelength at 0.26 nm/V. The high tuning per volt is attributed to an improved overlap integral in the thin-film form of the device.
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Izuhara et al. (2003) studied this question.
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