AlGaAs-based superlattice microcoolers are demonstrated. Maximum cooling temperatures of 0.8 °C and 2 °C were obtained at 25 °C and 100 °C, respectively, from 60 μm×60 μm devices with 100 period Al0.10Ga0.90As/Al0.20Ga0.80As n-type superlattice thermal barriers. These devices may be useful for in situ cooling of GaAs-based microelectronic and optoelectronic devices.
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Zhang et al. (2003) studied this question.
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