Resonant MEMS Tunable VCSEL

We demonstrate how resonant excitation of a microelectromechanical system can be used to increase the tuning range of a vertical-cavity surface-emitting laser twofold by enabling both blue- and red-shifting of the wavelength. In this way, a short-cavity design enabling wide tuning range can be realized. A high-index-contrast subwavelength grating vertical-cavity surface-emitting laser with a monolithically integrated antireflection coating is presented. By incorporating an antireflection coating into the air cavity, higher tuning efficiency can be achieved at low threshold current. The first result shows 24-nm continuous resonant tuning range around an emission wavelength of 1060 nm with 0.9 mW output power.