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September 1, 1964Japanese Journal of Applied Physics

Distribution of Dislocations near the Junction Formed by Diffusion of Phosphorus in Silicon

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YSYasuo SatôShinshu University HospitalHAHikaru ArataMinistry of Communications

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Satô et al. (1964) studied this question.

synapsesocial.com/papers/6a6f2ef778a11c550e08dd93https://doi.org/10.1143/jjap.3.511
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