Strong Room-Temperature UV Luminescence from ZnO Grown by Metal Organic Decomposition

ZnO films were fabricated on glass substrates by metal organic decomposition (MOD). X-ray diffraction, reflection high-energy electron diffraction, and energy-dispersive X-ray spectroscopy revealed that the obtained ZnO films are stoichiometric polycrystalline with a wurtzite structure. Strong near-band-edge emission in the UV region without any deep-level emissions was observed from the ZnO films at room temperature. The results show that MOD is a promising growth method for obtaining high-quality ZnO films, which paves the way for the fabrication of electronic and optoelectronic devices using ZnO at low cost.