Radio frequency (RF) MEMS is an emerging sub-area of MEMS technology that is revolutionizing RF and microwave applications. RF MEMS devices have a broad range of optional applications in military and commercial wireless communication, and navigation and sensor systems. This article presents the EM design of different multiport toggle switches. Such a multiport switch can be used in the compact designs of switching matrices, routing networks, or phase shifters. One application range is the creation of electronically steerable antenna arrays, which can be used for radar applications and satellite communication. The miniaturized switches are based on the single pole single throw (SPST) toggle switch and, in addition to their small size, they have an increased RF performance regarding losses and operation bandwidth (DC to 50 GHz). A 3D FDTD field solver has been used for the electromagnetic design of all the switches.
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Simon et al. (2004) studied this question.