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April 1, 1990Journal of Engineering Materials and TechnologyOpen Access

Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification, and Synthesis

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JCJ. J. CuomoNorth Carolina State UniversitySRS. M. RossnagelUniversity of VirginiaHHH. R. Haufman

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Cuomo et al. (1990) studied this question.

synapsesocial.com/papers/6a6f5fe5a528af2d65c2f56fhttps://doi.org/10.1115/1.2903317
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