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May 1, 1994Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Nanofabrication and rapid imaging with a scanning tunneling microscope

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Authors

SRScott E. RubelMotorola (United States)MTMickaël TrochetCentre National de la Recherche ScientifiqueEEE. E. EhrichsGlobalFoundries (United States)

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Cite This Study

Rubel et al. (1994) studied this question.

synapsesocial.com/papers/6a6f63718031ec7bb1dbb928https://doi.org/10.1116/1.587664
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