The analysis of a silicon-based step-index waveguide with a corrugation grating at its surface is performed by considering the reflec- tion between the silicon substrate and the optical buffer. The conditions on the silica buffer thickness for maximum in/out coupling into the sub- strate and into the air are given analytically, and a number of features of practical interest are described.
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V A Sychugov (1996) studied this question.