A new three‐dimensional 30 GHz bandpass filter using the LIGA micromachined process

In this letter, a new micromachined 3‐D bandpass filter in the Ka‐band is proposed using the LIGA process. The characteristic impedance and design parameters for the 3‐D filter are determined from the experimental results and the filter design rule. The filter shows a wide‐bandpass characteristic of 39%, with an insertion loss of 1.7 dB at 33.2 GHz, and can be applicable in high‐power MMICs.