Efficient semi-numerical analysis of acoustic sensors using spectral domain methods—a review

Microacoustic sensors often represent a challenge in device modeling as coupled electromechanical fields and piezoelectric media are involved. Due to this complexity and because of the sometimes adverse ratios of characteristic dimensions to the device size (e.g., in the case of thickness shear mode resonators), the successful application of numerical models such as provided by the finite element method is not always possible in an efficient manner. In numerical electromagnetics and in the analysis of surface acoustic wave devices, the spectral domain method has been established as a useful semi-numerical tool allowing the computationally efficient implementation of device models. In recent years, we have successfully applied the method to several problems involving acoustic sensors. In this paper, the foundations of the method are reviewed and its application in the analysis of selected microacoustic sensors is discussed.