Characteristics of atmospheric-pressure, radio-frequency glow discharges operated with argon added ethanol

Rf, atmospheric-pressure glow discharge (APGD) plasmas with bare metal electrodes have promising prospects in the fields of plasma-aided etching, thin film deposition, disinfection and sterilization, etc. In this paper, the discharge characteristics are presented for the rf APGD plasmas generated with pure argon or argon-ethanol mixture as the plasma-forming gas and using water-cooled, bare copper electrodes. The experimental results show that the breakdown voltage can be reduced significantly when a small amount of ethanol is added into argon, probably due to the fact that the Penning ionization process is involved, and a pure α-mode discharge can be produced more easily with the help of ethanol. The uniformity of the rf APGDs of pure argon or argon-ethanol mixtures using bare metallic electrodes is identified with the aid of the intensified charge coupled device images.