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April 1, 1974Journal of Applied Physics

Glow-discharge mass spectrometry—Technique for determining elemental composition profiles in solids

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JCJ. W. CoburnUniversity of UtahETE. TaglauerMax Planck SocietyEKE. KayPrinceton University

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Coburn et al. (1974) studied this question.

synapsesocial.com/papers/6a6fa688fe4101aa97dfda89https://doi.org/10.1063/1.1663490
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