Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O

Photoluminescence spectroscopy of the plasma plume during plasma-assisted laser deposition of YBa2Cu3O7−x was performed. The spectrum in the range of 355–900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O+, Y, Y+, Ba, Ba+, and Cu were observed, from which the plasma temperature could be estimated. Cu+ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin-film formation is discussed.