Multilayer Piezoelectric Motor Using the First Longitudinal and the Second Bending Vibrations

A piezoelectric linear motor using a double-mode vibrator was constructed with one of the vibration modes being the first longitudinal and the other, the second bending. In order to reduce driving voltage, a multilayer piezoelectric ceramics vibrator prepared by a cofiring method was used. Moreover, we proposed a new type of supportive mount for the vibrator to facilitate the construction of the motor. In the new method the vibrator is bonded to an attachment plate by an elastic layer. In this paper, characteristics of the motor are described.