Synchronized Multiple-Array Vibrational Device for Microelectromechanical System Electrostatic Energy Harvester

In this paper, we describe a novel structure of a vibrational micro-electro-mechanical system (MEMS) device for power generation enhancement. A synchronized multiple-array vibrational device, in which movable plates are connected by rods, increases the area of the movable plate in the energy conversion region and couples the phase of movement. The fabricated device resonates at approximately 1430 Hz with an acceleration amplitude of 6 m/s 2 and nanoampere-order AC current is generated. These results confirm that this MEMS vibrational device will contribute to the progress in energy harvesting.