Minority carrier lifetime in silicon which has been diffused in plus nitrogen at 1100°C may be in excess of 100 µsec. Diffusion at 1200°C may give lifetimes in excess of 25 µsec. The lifetimes are significantly higher than the values obtained by heat treatment without the . A similar effect is observed if chlorine or is added to the nitrogen ambient. Some lifetime preservation after extended heat treatment following the treatment indicates that the glassy layer deposited during the treatment plays a significant role in the process.
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Waldner et al. (1960) studied this question.