Spectrally resolved cathodoluminescence analyses in the optical near‐field

By implementing a scanning near-field optical microscope into the specimen chamber of a scanning electron microscope, cathodoluminescence can be locally detected in the optical near-field. The achievable spatial resolution in this set-up is only limited by the size of the aperture in a coated fibre probe and its separation from the sample, rather than by the energy dissipation volume of the primary electrons and diffusion processes of excess carriers inside the specimen. We demonstrate how electronically active defects in polycrystalline diamond can be distinguished and localized with sub-wavelength lateral resolution by spectral filtering of the cathodoluminescence signal.