Titanium dioxide (TiO 2 ) films were deposited by r.f. reactive magnetron sputtering on the following four different substrates, (a) nonalkali glass (Corning #7059), (b) MgO (100), (c) SrTiO 3 (100) and (d) rutile (110), (001), (100), where (b)-(d) were single crystals. X-ray diffraction and pole figure analyses revealed that TiO 2 films on (a) were anatase polycrystals with (101) preferred orientation, whereas hetero- or homoepitaxial growth of anatase or rutile TiO 2 was observed on the (b)-(d) substrates. The epitaxial relationships were as follows: (b) anatase (100)[001]∥MgO(100)[001], (c) anatase (001)[100]∥SrTiO 3 (100)[001] and (d) rutile homoepitaxy. The heteroepitaxial anatase films with the thickness greater than 100 nm showed UV-induced super-hydrophilicity, where the water contact angle decreased to less than 1°.
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Song et al. (2003) studied this question.