Single-mode planar waveguide microlenses and microlens arrays in LiNbO3 have been fabricated using a combination of titanium diffusion and proton exchange processes. The lenses have demonstrated properties such as very short focal length, micron focal spot size, and large angular field of view that are desirable for applications in integrated and fiber-optic signal processing and computing as well as communication systems.
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Zang et al. (1985) studied this question.
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