⌘+K

Pulse Explore Clubs Researchers Journals

Home Clubs Explore

February 1, 1995Optical Engineering

In situ end-point detection during development of submicrometer grating structures in photoresist

View Full Paper

Ask AI

Bookmark

Share

Authors

JBJerald A. BrittenLawrence Livermore National Laboratory

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Jerald A. Britten (1995) studied this question.

synapsesocial.com/papers/6a708e9735aa2c282ce1dff9 https://doi.org/10.1117/12.194046

View Full Paper

Ask AI

Bookmark

Share