Answers are grounded in this paper and cite their sources.
An atomic scale model of thermal oxidation of Si(100) has been developed based on a kinetic Monte Carlo approach. This method makes it possible to analyze the effects of elementary mechanistic steps of oxidation on macroscopic surfaces. The initial thermal decomposition of chemisorbed hydroxyl groups resulting from water adsorption on Si(100)-(2×1) is investigated by utilizing extensive IR data and ab initio calculations.
No takes yet. Share an insight, caveat, or question.
Estève et al. (2001) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: