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November 2, 2007Journal of Physics D Applied Physics

Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

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Authors

JSJulian SchulzeRuhr University BochumTGTimo GansDublin City UniversityDODeborah O’ConnellCancer Council NSW

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Schulze et al. (2007) studied this question.

synapsesocial.com/papers/6a709699f44fa9f079de414fhttps://doi.org/10.1088/0022-3727/40/22/022
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