Ultrafast laser parallel microdrilling using multiple annular beams generated by a spatial light modulator

Ultrafast laser parallel microdrilling using diffractive multiple annular beam patterns is demonstrated in this paper. The annular beam was generated by diffractive axicon computer generated holograms (CGHs) using a spatial light modulator. The diameter of the annular beam can be easily adjusted by varying the radius of the smallest ring in the axicon. Multiple annular beams with arbitrary arrangement and multiple annular beam arrays were generated by superimposing an axicon CGH onto a grating and lenses algorithm calculated multi-beam CGH and a binary Dammann grating CGH, respectively. Microholes were drilled through a 0.03 mm thick stainless steel foil using the multiple annular beams. By avoiding huge laser output attenuation and mechanical annular scanning, the processing is ∼200 times faster than the normal single beam processing.