We report a compact flat-top beam shaper fabricated by laser-assisted chemical etching upon an ion-exchanged high-energy- beam-sensitive glass. The beam shaper combines a phase filter element and a focusing lens element into a single diffractive optical element with a quasi-continuous surface relief profile. The fabrication takes advantage of the laser generation of gray-level patterns and one-step etching that are effective especially for such beam shaper fabrication. The demon- strated beam shaper with good flatness and edge features has an en- ergy efficiency of 82%.
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Xu Huang (1999) studied this question.
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