Facile and Controlled Synthesis of Ultra‐Thin Low Dielectric Constant Meso/Microporous Silica Films

Fancy films: Microporous zeolite silicalite-1 nanoparticles with regular particle dimensions are dispersed within self-assembled mesoporous silica thin films in order to fabricate thin films with low dielectric constants. The mesoporous component functions as a binder material which increases the adhesion of the zeolite films to the underlying silicon substrate without augmenting the dielectric constant.