GaN-based surface acoustic wave (SAW) filters with Ni/n+-GaN-based interdigital transducers (IDTs) were investigated. Their RF characteristics revealed a main peak and neighbouring sidelobes, which indicates that SAWs are successfully excited in the filters. The results mean that conductive GaN layers can be used for IDTs, substituting for metal layers
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Nishimura et al. (2006) studied this question.
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