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Fe/Co multilayer films with various Fe layer and Co layer thicknesses ( d Fe , d Co ) were deposited by an rf magnetron sputtering method. The bcc single phase was obtained for films with smaller thicknesses of Co than 2 nm. A mixture of bcc and hcp phases was obtained for films with larger thicknesses of Fe and Co than 5 nm. Among the bcc single phase films, d Fe =d Co =1 nm film showed the highest saturation magnetic flux density ( B s ) value. After annealing at 350°C for 1 h, B s of this film increased to 2.40 T. This increase was attributed to interdiffusion of Fe and Co.
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Komuro et al. (1988) studied this question.
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